JEOL Ltd. (President Gon-emon Kurihara) announces the release of the JXA-8530FPlus Electron Probe Microanalyzer (EPMA) equipped with the In-Lens Schottky Plus FEG (field emission gun), to be distributed in January 5, 2017.

Product development background

JEOL commercialized the world’s first FE-EPMA, the JXA-8500F in 2003. This highly regarded FE-EPMA has long been used in various fields, such as: metals, materials and geology in both industry and academia.
The JXA-8530FPlus is a third-generation FE-EPMA that comes with enhanced analytical and imaging capabilities, delivered by an improved electron optical system. The In-Lens Schottky FEG combined with new software provides higher throughput. This new cutting-edge FE-EPMA also adopts a highly-expandable multipurpose chamber. Incorporating various functions, the JXA-8530FPlus meets a variety of demands of users while maintaining high stability, thus allowing a wider range of EPMA applications to be achieved with higher resolution.

Main Features


1. In-lens Schottky Plus FEG EPMA version.

2. Advanced software
Flexible WDS configuration

3. Combined WDS/EDS system

4. Multipurpose chamber

5. Powerful clean vacuum system.

6. Soft X-ray Emission Spectrometer (SXES).

7. miXcroscopy(Correlative microscope)


At low kV (5-7kV) with WDS (wavelength dispersive X-ray spectrometer),  high probe current, and small probe diameter, the JXA-8530F is capable of extreme elemental analysis of sub-micron areas (approaching 100nm)

This new microprobe will include: 1) Trace Element Analysis Program for simpler, optimized analysis of trace elements including adding data collected from up to 5 spectrometers, 2) Phase Map Maker for automatic creation of phase maps based on principal components, 3) Non-Flat Surface Analysis Program for automated WDS analysis of specimens with surface  iiregularties and plenty of others new and very attractive features